nanoFAB Fabrication & Characterization Centre
The nanoFAB is a national, open-access training, service, and collaboration centre, focused on academic and industrial applications in micro- and nanoscale fabrication and characterization.
Totalling over $84M in specialized equipment and infrastructure
Over 200 pieces of equipment in 25 000 sq ft communal laboratory space
Complete capabilities for microscopy, spectroscopy, material analysis, lithography, thin-film deposition, and etching
Advanced materials, microscopy, and spectroscopy analysis suite
Fabrication for MEMS, sensors, microfluidics, and photonics
Fully equipped 4" (100 mm) and 6" (150 mm) processing capabilities
Who we are
The nanoFAB is an open access micro and nano fabrication research facility. Our mission is to provide the equipment, infrastructure and expertise necessary for our user community to achieve their research goals.
The nanoFAB originates from a long history of diligent and dedicated research efforts from a diverse group of professors. Learn more about the origins of the facility and the growth over the past decade which has brought it to todays state.
The nanoFAB Centre main cleanroom facility and characterization lab is located in the Electrical and Computer Engineering Research Facility , with extended characterization equipment located in…
The nanoFAB would not exist without the continued support of a number of groups. We would like to say a special thank you to the following organizations:
The nanoFAB staff are here to act as resources to assist you in your project needs while working in the facility. Our team of dedicated staff leverage years of research & industry experience to help find creative solutions to your most demanding problems.
Use this online form to send a general message to the nanoFAB staff. If you are trying to contact a specific staff member, please use the Staff Directory.
As an open-access facility, the nanoFAB is available for public tours. Tours can be catered towards the interest of the group: we have hosted…