nanoFAB Fabrication & Characterization Centre

The nanoFAB is a national, open-access training, service, and collaboration centre, focused on academic and industrial applications in micro- and nanoscale fabrication and characterization.

  • Totalling over $84M in specialized equipment and infrastructure

  • Over 200 pieces of equipment in 25 000 sq ft communal laboratory space

  • Complete capabilities for microscopy, spectroscopy, material analysis, lithography, thin-film deposition, and etching

  • Advanced materials, microscopy, and spectroscopy analysis suite

  • Fabrication for MEMS, sensors, microfluidics, and photonics

  • Fully equipped 4" (100 mm) and 6" (150 mm) processing capabilities

  • Who we are
    The nanoFAB is an open access micro and nano fabrication research facility. Our mission is to provide the equipment, infrastructure and expertise necessary for our user community to achieve their research goals.

  • History
    The nanoFAB originates from a long history of diligent and dedicated research efforts from a diverse group of professors. Learn more about the origins of the facility and the growth over the past decade which has brought it to todays state.

  • Getting Here
    The nanoFAB Centre main cleanroom facility and characterization lab is located in the Electrical and Computer Engineering Research Facility , with extended characterization equipment located in…

  • Sponsors
    The nanoFAB would not exist without the continued support of a number of groups. We would like to say a special thank you to the following organizations:

  • Staff Directory
    The nanoFAB staff are here to act as resources to assist you in your project needs while working in the facility. Our team of dedicated staff leverage years of research & industry experience to help find creative solutions to your most demanding problems.

  • Contact Us
    Use this online form to send a general message to the nanoFAB staff. If you are trying to contact a specific staff member, please use the Staff Directory.

  • Tour Requests
    As an open-access facility, the nanoFAB is available for public tours. Tours can be catered towards the interest of the group: we have hosted…